The micro-spot optical spectra reflectometer is a compact portable optical instrument for measuring optical reflectance spectra from a small area of device surface. Typical sizes that can be measured are 5, 10, 50, 100, 200, and 300 microns. Wavelength ranges cover UV (200 – 350 nm), visible and near infra-red (350 to 1000 nm), and short-wave infra-red (1000 to 1700 nm), respectively. Spectral resolution of measurement is typically 1.0 nm, but can be as small as 0.2 nm.
The instrument can also be used to measure dynamic changes of the spectrum with time for tracking spectral features (such as peaks or valleys) in the reflection spectrum.
The instrument produces quick and convenient measurements of reflection spectra of small areas. In measurement, the instrument is connected to a computer via a USB connector for data acquisition and processing. The instrument can be used in various application settings, such as research laboratories, factories, and etc.
The micro-area optical spectral reflectometer can be used for characterizations of optical and semiconductor devices, and quantitative chemical and material analysis. Examples of applications include, but are not limited to:
